Optical device and method of manufacture thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jan 22, 2004
app pub date -
Jul 19, 2002
filing date -
Jul 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention is directed to an optical waveguide ridge having a waveguide formed therein and a method of manufacturing that optical waveguide ridge. The optical waveguide ridge has sidewalls that are more vertical than those previously manufactured. These increase in verticality is achieved by performing a plasma etch with an etchant on an optoelectronic substrate and adjusting a process parameter of the plasma etch to form a polymer layer over the optoelectronic substrate. In addition, the method includes readjusting the process parameter to etch the polymer layer and the optoelectronic substrate.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully