Plasma processing comprising three rotational motions of an article being processed
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United States of America Patent
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app pub date -
Jul 24, 2003
filing date -
Nov 14, 2000
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Abandoned
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Abstract
An article which is being processed with plasma is moved during plasma processing so that the motion of the article comprises at least a first rotational motion, a second rotational motion, and a third rotational motion which occur simultaneously. The apparatus that moves the article comprises a first arm rotatable around a first axis, a second arm rotatably attached to the first arm and rotating the article around a second axis, and a rotational mechanism for inducing a rotational motion of the article in addition to, and simultaneously with, the rotation of the first and second arms.
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