Method and apparatus for forming a thin film on a tape substrate
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United States of America Patent
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Issued Date -
Feb 5, 2004
app pub date -
Jul 26, 2002
filing date -
Jul 26, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention continuously deposits materials used to grow a thin film onto a moving tape. The invention preferably uses a pay-out reel and take-up reel to respectively dispense and spool the tape substrate at a constant rate. The invention preferably uses a series of stages to form the thin film on the tape, and includes at least one reactor or reaction chamber to deposit one or more materials onto the tape substrate that is used to form the superconductor layer, and one or more chambers to deposit buffer layers between the film and the metal tape substrate or between layers of film, as well as for the deposition of coating layers. The invention also preferably uses transition chambers between the stages to isolate each stage from the other stages.
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