Optical attenuator
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United States of America Patent
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N/A
Issued Date -
Feb 19, 2004
app pub date -
Aug 13, 2002
filing date -
Aug 13, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A microelectromechanical system (MEMS) optical device is introduced which includes a mirror constructed on a substrate. The mirror is movable parallel to the surface of the substrate to control whether an input ray passes undisturbed or is reflected to an alternate output. In one embodiment, a variation on a comb-drive designed to produce larger forces than usual uses an envelope-like electrode into which the mirror is drawn. In a second embodiment, a mirror is supported on flexible beams which are attracted or repelled by electrostatically charging curved electrodes thereby actuating the mirror. In a third embodiment, a magnetic field around the switch induces lateral forces when electric current flows in conductive supporting beams.
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