Fiber optic micro accelerometer
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United States of America Patent
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-
Jul 26, 2005
Grant Date -
Mar 11, 2004
app pub date -
Sep 10, 2002
filing date -
Sep 10, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An accelerometer includes a wafer, a proof mass integrated into the wafer, at least one spring member connected to the proof mass, and an optical fiber. A Fabry-Perot cavity is formed by a partially reflective surface on the proof mass and a partially reflective surface on the end of the optical fiber. The two partially reflective surfaces are used to detect movement of the proof mass through the optical fiber, using an optical detection system.
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