Liquid organometallic compound vaporizing/feeding system
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United States of America Patent
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N/A
Issued Date -
Mar 25, 2004
app pub date -
Sep 22, 2003
filing date -
Sep 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A liquid organometallic compound vaporizing and feeding system includes a container containing a liquid organometallic compound MO, a vaporizer for vaporizing MO, a liquid passageway connecting the container to the vaporizer and having a liquid MO mass flow controller, a carrier gas source, a carrier gas passageway connecting the source to the vaporizer and having a carrier gas mass flow controller, a sample gas passageway connecting the vaporizer to an ICP emission spectrometer and having an in-line monitor, a calibration standard gas cylinder, and a standard gas passageway connecting the cylinder to the sample gas passageway downstream of the in-line monitor and having a standard gas mass flow controller.
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