System for imaging a cross-section of a substrate
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United States of America Patent
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-
Jan 4, 2005
Grant Date -
Apr 8, 2004
app pub date -
Oct 3, 2003
filing date -
Feb 25, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A system for obtaining an image of a cross-sectional surface of a workpiece includes a shaped beam ion projection column oriented along a first axis. The ion projection column projects an image of an aperture on the workpiece surface, thereby excavating a portion of the surface and exposing a cross-sectional surface. Because the ion beam is not focused on the surface, a low brightness ion source can be used. A focused particle beam column, typically a scanning electron microscope, is oriented along a second axis that intersects the first axis at a selected angle. This focused particle beam column generates a particle beam that is used to image the cross-sectional surface exposed by the ion projection column.
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