Fabrication of a reflective spatial light modulator
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United States of America Patent
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Issued Date -
Apr 15, 2004
app pub date -
Feb 27, 2003
filing date -
Jun 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support posts, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.
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