Interferometer using integrated imaging array and high-density polarizer array

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United States of America Patent

PATENT NO 6850329
APP PUB NO 20040070767A1
SERIAL NO

10270130

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An integrated imaging element for an interferometer generates at least one image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density polarizing array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated because multiple phase-shifted interference image information for a small region of an object is provided within a small region on the detector device.

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Patent Owner(s)

  • MITUTOYO CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Atherton, Kim W Kirkland, WA 29 1096
Tobiason, Joseph D Woddinville, WA 23 604

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