Misalignment amount detection apparatus and alignment apparatus, and accuracy analysis apparatus with the alignment apparatus
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United States of America Patent
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N/A
Issued Date -
Apr 15, 2004
app pub date -
Oct 7, 2003
filing date -
Oct 7, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An alignment apparatus 2 has a rotation angle position detector 35 comprising relatively rotatable first and second members 36 and 37. The first member 36 is secured on a first base 10 on a rotary table 83, and the second member 37 is secured to the lower face of a second base 41. A first movable body 43 is disposed on the second base 41 to be movable along a first axis, and a second movable body 45 is disposed on the first movable body 43 to be movable along a second axis. When the rotary table 83 is rotated while the second movable body 45 is restrained, the first movable body 43 is moved along the first and second axes. The misalignment amount between the rotary table 83 and the rotation angle position detector 35 is calculated from the movement position of the first movable body 43.
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