Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions

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United States of America Patent

PATENT NO 6841333
APP PUB NO 20040087690A1
SERIAL NO

10286330

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Abstract

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Photoacid generator salts comprising photoactive cationic moieties and segmented, highly fluorinated-hydrocarbon anionic moieties are disclosed which provide high photoacid strength and can be tailored for solubility and polarity. The present invention further relates to photoacid generators as they are used in photoinitiated acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.

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Patent Owner(s)

Patent OwnerAddress
3M INNOVATIVE PROPERTIES COMPANYP O BOX 33427 SAINT PAUL MN 55133-3427

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Gregory D Saint Paul, MN 16 385
Flynn, Richard M Mahtomedi, MN 144 2998
Lamanna, William M Stillwater, MN 114 2053
Qiu, Zai-Ming Woodbury, MN 150 1574

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