Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions

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United States of America Patent

PATENT NO 6841333
APP PUB NO 20040087690A1
SERIAL NO

10286330

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Photoacid generator salts comprising photoactive cationic moieties and segmented, highly fluorinated-hydrocarbon anionic moieties are disclosed which provide high photoacid strength and can be tailored for solubility and polarity. The present invention further relates to photoacid generators as they are used in photoinitiated acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.

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Patent Owner(s)

  • 3M INNOVATIVE PROPERTIES COMPANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Gregory D Saint Paul, MN 15 376
Flynn, Richard M Mahtomedi, MN 144 2932
Lamanna, William M Stillwater, MN 114 1997
Qiu, Zai-Ming Woodbury, MN 144 1510

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