Method of fabricating polishing pad having detection window thereon
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United States of America Patent
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N/A
Issued Date -
May 20, 2004
app pub date -
May 14, 2003
filing date -
Nov 19, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a method of fabricating a polishing pad having a detection window thereon. A mold having a cavity therein and a transparent thermosetting plastic part that is incompletely hardened are provided. The transparent thermosetting plastic part is disposed in the mold and a high molecular weight foam is injected into the cavity of the mold. The transparent thermosetting plastic part and the high molecular weight foam are hardened at the same time. After the step of demolding is performed, a polishing pad having a detection window thereon is formed. Moreover, the transparent thermosetting plastic part can be designed to have the central portion thicker than its peripheral portion for preventing deformation that is caused by the material difference of the detection window and other portions of the polishing pad.
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