Method of separating a template from a substrate during imprint lithography
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United States of America Patent
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Mar 22, 2005
Grant Date -
Jun 3, 2004
app pub date -
Jul 10, 2003
filing date -
Oct 29, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.
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