Substrate holder
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United States of America Patent
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-
N/A
Issued Date -
Jun 10, 2004
app pub date -
Sep 5, 2003
filing date -
Sep 6, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A system and method of selectively fastening a substrate to a limited travel staging system are disclosed. In accordance with one aspect of a substrate holder, a securing mechanism may be manually or automatically moved in a repeatable manner such that a selected region of a substrate can be moved into the precision travel range of a highly accurate staging system. Some embodiments of a substrate holder may comprise an indexing system enabling referenced movements such that one or more selected substrate regions may be moved relative to the stage.
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