Method for the production of a functional coating by means of high-frequency plasma beam source
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jun 17, 2004
app pub date -
Jan 20, 2004
filing date -
Feb 2, 2001
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method is proposed for producing a functional coating on a substrate (19) disposed in a chamber (40), a plasma (21) being generated by an inductively coupled, high-frequency plasma jet source (5) having a burner member (25) which delimits a plasma generating space (27) and has a discharge aperture (26). This plasma (21) then exits via the discharge aperture in the form of a plasma jet (20) from the plasma jet source (5) and enters into the chamber (40) connected thereto, where it acts on the substrate (19) for producing the functional coating. In this context, it is also provided that between the interior of the chamber (40) and the plasma generating space (27), at least at times a pressure gradient is produced which accelerates particles contained in the plasma jet (20) toward the substrate (19).
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully