Showerheads
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jul 1, 2004
app pub date -
Jul 24, 2003
filing date -
Aug 8, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A showerhead for substrate processing including a gas inlet leading to a gas reservoir. A faceplate including a plurality of orifices is fitted between the reservoir and a processing space. The showerhead further includes a sheet including a plurality of orifices, the sheet orifices being smaller in size than the minimum diameter of the faceplate orifices. The sheet is fitted in or on the showerhead such that the fluid passes to the process space from the reservoir via the sheet orifices.
First Claim
Family
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Cited Art Landscape
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