Importance

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Abstract

A precision assembly (10) includes a stage assembly (220) having a first stage (208), a first mover assembly (210) and a control system (24). The first mover assembly (210) moves the first stage (208) during a first iteration (300) and a subsequent second iteration (302) having a similar movement to the first iteration (300). The first iteration (300) generates positioning data that is sent to the control system (24) to control the first mover assembly (210) to adjust movement of the first stage (208) during the second iteration (302) based on at least a portion of the positioning data from the first iteration (300). The positioning data can include the position of the first stage (208) along a first axis, a second axis and/or a third axis. The stage assembly can also include a second stage (206) and a second mover assembly (204) that moves the second stage (206) synchronously with the first stage (208). The second stage (206) generates positioning data that is used by the control system (24) to adjust movement the first mover assembly (210) of the first stage (208) to improve synchronization of movement of the stages. The precision assembly (10) can also include one or more sensors (23) that monitor movement of one or more components of the precision assembly (10) other than the stage assembly (220). Positioning data of such movement is sent to the control system (24) to control movement of the first stage (208).

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First Claim