Gas content microsensor
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United States of America Patent
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Issued Date -
Jul 8, 2004
app pub date -
Nov 5, 2003
filing date -
Nov 5, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A sensor for monitoring gas content. The sensor comprises a housing defining at least two cavities and a resonating structure positioned in each of the cavities. Each of the resonating structures has a resonant frequency dependent upon a physical characteristic of a gas in its respective cavity. Means for exciting the resonating structures generates output signals therefrom, and means compares the output signals from each of the resonating structures and outputs a comparison signal indicative of a difference between the resonant frequencies of the two structures and the relative gas content of the at least two cavities.
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