Semiconductor device and manufacturing method thereof

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United States of America Patent

PATENT NO 7037752
SERIAL NO

10740422

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Abstract

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A technique for manufacturing a low-cost, small volume, and highly integrated semiconductor device is provided. A characteristic of the present invention is that a semiconductor element formed by using a semiconductor thin film is transferred over a semiconductor element formed by using a semiconductor substrate by a transfer technique in order to manufacture a semiconductor device. Compared with the conventional manufacturing method, mass production of semiconductor devices with lower cost and higher throughput can be realized, and production cost per semiconductor device can be reduced.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goto, Yuugo Atsugi, JP 126 5073
Kuwabara, Hideaki Isehara, JP 313 24609
Maruyama, Junya Ebina, JP 219 10819
Ohno, Yumiko Atsugi, JP 100 3795
Takayama, Toru Atsugi, JP 530 27252
Yamazaki, Shunpei Setagaya, JP 7287 226692

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