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Abstract

An electrically tunable Fabry-Perot structure using a deformable multi-layer mirror construction wherein Ga.sub.1-aAl.sub.aAs, where a<0.1, is used as the sacrificial layer which may be selectively removed using a citric acid enchant. The multi-layer mirrors consist of N and M period of quarter wavelength layers where N and M are integers, or integers plus 1/2. Further, the mirrors are made from alternating layers of Ga.sub.1-xAl.sub.xAs, where x>0.96, and a material selected from the group consisting of either Ga.sub.1-zAl.sub.zAs, where 0.7>Z>0, or Ga.sub.1-yAl.sub.yAs/Ga.sub.1-zAl.sub.zAs/Ga.sub.1-yAl.sub.yAs where 0.7>Z>0 and y>0.5. The Ga.sub.1-xAl.sub.xAs is wet oxidized by exposing its edge to water in a nitrogen or helium atmosphere at a temperature of between about 360.degree. C. and 450.degree. C. so as to transform it to AlO.sub.x. The resulting AlO.sub.x layers abut the sacrificial layer and act as etch stops during the formation of a cantilever Fabry-Perot structure by etching of the sacrificial layer.

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