Wl-bga for MEMS/MOEMS devices

United States of America Patent

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Issued Date
Jul 22, 2004
app pub date
Jan 21, 2003
filing date
Jan 21, 2003

priority date (Note)
Abandoned

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Abstract

A MEMS/MOEMS device is provided on a first substrate which is bonded to a second substrate to form a package. Interconnections may be provided via the second substrate and an hermetic seal may be formed to protect the MEMS/MOEMS device from outgassing.

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Patent Owner(s)

Patent Owner	Address
UNITED TEST & ASSEMBLY CENTER LIMITED	5 SERANGOON NORTH AVENUE 5 554916

International Classification(s)

H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chong, Yok Rue Desmond	Singapore, SG	2	102
Kapoor, Rahul	Singapore, SG	59	984
Sun, Yi-Sheng	San Jose, CA	3	132

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Wl-bga for MEMS/MOEMS devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10347344

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APP PUB NO	20040140557A1
SERIAL NO	10347344
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10347344

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Family

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