Electroless plating solution and process

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United States of America Patent

PATENT NO 6797312
APP PUB NO 20040142114A1
SERIAL NO

10348612

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Abstract

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Electroless plating solutions are disclosed for forming metal alloys, such as cobalt-tungsten alloys. In accordance with the present invention, the electroless plating solutions may be formulated so as not to contain any alkali metals. Further, the solutions can be formulated without the use of tetramethylammonium hydroxide. In a further embodiment, a plating solution can be formulated that does not require the use of a catalyst, such as a palladium catalyst prior to depositing the metal alloy on a substrate.

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Patent Owner(s)

  • MATTSON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kong, Bob Newark, CA 10 97
Li, Nanhai San Jose, CA 12 123

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