Micro-fabricated device and method of making
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United States of America Patent
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Issued Date -
Jul 29, 2004
app pub date -
Jan 29, 2003
filing date -
Jan 29, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A micro-fabricated device, includes a support structure and a device substrate disposed a distance G from the support structure. The micro-fabricated device further includes one or more thermally isolating structures that have a characteristic length, and the one or more thermally isolating structures is thermally coupled to the device substrate and the support structure. The characteristic length is greater than said distance G.
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