Material sensing sensor and module using thin film bulk acoustic resonator
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United States of America Patent
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Issued Date -
Aug 5, 2004
app pub date -
Jan 23, 2004
filing date -
Jan 24, 2003
priority date (Note) -
Abandoned
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Abstract
A material sensing sensor using a thin film bulk acoustic resonator having a compact size and a high material measurement sensitivity is formed together with other material sensing sensors in an array form, and integrated with a signal processor on the same board, to thereby precisely sensing a plurality of materials, and a material sensing module. The material sensing sensor using a thin film bulk acoustic resonator (TFBAR) includes: a first thin film bulk acoustic resonator for generating a first resonant frequency according to the amount and/or thickness of a target material; and a reference thin film bulk acoustic resonator for generating a reference resonant frequency.
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