Fabrication of a reflective spatial light modulator
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United States of America Patent
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Apr 4, 2006
Grant Date -
Aug 19, 2004
app pub date -
Jan 13, 2004
filing date -
Jun 19, 2002
priority date (Note) -
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Abstract
Fabrication of a reflective spatial light modulator including a micro-mirror array. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material by only two main etching steps. A first etch forms cavities in a first side of the material. A second etch forms support posts, a vertical hinge, and a mirror plate. Between the first and second etches, the substrate can be bonded to addressing and control circuitry.
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