Method and apparatus for monitoring of a chemical characteristic of a process chemical
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United States of America Patent
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N/A
Issued Date -
Aug 26, 2004
app pub date -
Dec 11, 2003
filing date -
Dec 21, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and apparatus for performing online monitoring of a chemical state of a process material. A request to provide a process chemical to a processing tool is received. The process chemical is transported through a chemical transport unit, based upon the request, to the processing tool. An online monitoring of a chemical state of the process chemical is performed. The online monitoring of the process chemical includes analyzing a resultant of a radiation signal sent through the process chemical to determine a refractive index to determine whether the chemical state of the process chemical is within a predetermined level of tolerance.
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