System for dividing gas flow
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United States of America Patent
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Issued Date -
Sep 2, 2004
app pub date -
Jun 27, 2003
filing date -
Feb 28, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A system for dividing flow of gas into a plurality of secondary flow paths at predetermined ratios comprises pressure sensing type mass flow controllers in each secondary flow path and a common controller connected to the mass flow controllers. One of the secondary flow paths is fully opened, and the ratio of the flow rate in each of the other secondary flow paths relative to the flow rate in the fully opened path is set at a value of 1 or less. The common controller provides a set signal for each of the other mass flow controllers by multiplying a measured flow rate in the fully opened secondary flow path by a predetermined ratio. A wider range of divided flow ratios can be achieved and the response and flow accuracy are superior, especially when flow ratios are changed.
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