Apparatus for substrate pre-treatment

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United States of America Patent

SERIAL NO

10694999

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates generally to a method and apparatus for converting a precursor material, preferably organometallic, to a film, preferably metal-containing, that is adherent to at least a portion of a substrate. Both method and apparatus include a pre-conversion step or section, and a step or section for substantial conversion of a portion of material from the pre-conversion step or section into the form of a predetermined pattern, wherein this substantial conversion results in a metal-containing patterned layer on the substrate.

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Patent Owner(s)

Patent OwnerAddress
SIMON FRASER UNIVERSITYINNOVATION OFFICE DISCOVER 2 8888 UNIVERSITY DRIVE BURNABY V5A 1S6

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barstow, Sean Atlanta, GA 36 582
Fury, Michael A San Francisco, CA 13 242
Henderson, Clifford Conyers, GA 9 157
Hill, Ross H Coquitlam, CA 13 322
Lee, Wai M Fremont, CA 11 633
Maloney, David J Pleasanton, CA 33 474
Roman, Paul J Pleasanton, CA 2 18

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