Microdevice assembly having a fine grain getter layer for maintaining vacuum
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United States of America Patent
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-
Mar 15, 2005
Grant Date -
Sep 30, 2004
app pub date -
Mar 31, 2003
filing date -
Mar 31, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microdevice assembly (20) that includes a device microstructure (22), a housing (30), and a fine grain getter layer (40). The housing (30) has a base portion (32) and a lid (34). The device microstructure (22) is attached to the base portion (32) and the lid (34) is hermetically sealed to the base portion (32). The housing (30) defines a cavity (38) surrounding the device microstructure (22). The fine grain getter layer (40) is on an interior side (42) of the lid (34) for maintaining a vacuum in the cavity (38) surrounding the device microstructure (22). The lid (34) may be made of metal or have at least a metallic surface in the region where the fine grain getter layer (40) is applied. The fine grain getter layer (40) has a sub-micron grain size. There is also a method for making the microdevice assembly (20).
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