MEMS device having time-varying control
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United States of America Patent
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app pub date -
May 18, 2004
filing date -
May 7, 2002
priority date (Note) -
Abandoned
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Abstract
Devices and methods for controlling a MEMS actuator are disclosed. The device includes a pair of parallel plates having a gap therebetween. The size of the gap is responsive to a voltage differential between the pair of plates. The device also includes a controller adapted to apply a voltage profile to at least one of the pair of plates to maintain a desired gap size. The voltage profile has a time-varying voltage.
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