Method of inspecting defects

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United States of America Patent

PATENT NO 7508973
APP PUB NO 20040228515A1
SERIAL NO

10809321

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Abstract

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A method of inspecting detects includes assigning a plurality of sets of image acquisition conditions, executing inspection using each of the sets of conditions, classifying all detected defects into real defects and false defects by use of an automatic defect classification function, and selecting, from the plurality of sets of conditions, a set of conditions ideal for detection.

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Patent Owner(s)

Patent OwnerAddress
HITACHI HIGH-TECHNOLOGIES CORPORATIONTOKYO 105-8717

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Maeda, Shunji Yokohama , JP 206 4836
Nishiyama, Hidetoshi Fujisawa , JP 131 2044
Okabe, Takafumi Yokohama , JP 35 806
Shibata, Yukihiro Fujisawa, JP 114 1741

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