Method and apparatus for cooling a planar workpiece in an evacuated environment with dynamically moveable heat sinks

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United States of America Patent

PATENT NO 8701753
APP PUB NO 20040250996A1
SERIAL NO

10849848

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Abstract

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An apparatus and method for cooling a planar workpiece, such as a substrate of a recording disk, in an evacuated environment has a heat exchanging structure with at least two heat sinks having substantially parallel facing surfaces disposed within a vacuum chamber. A drive arrangement is connected to the heat sinks to controllably and dynamically drive the parallel facing surfaces of the heat sinks towards and away from each other.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mcleaod, Paul Berkeley, US 1 6
Tanaka, Tatsuru Campbell, US 11 188
Yi, Chang Bok Fremont, US 5 17

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