Multilayer getter structures and methods for making same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7413814
APP PUB NO 20040253476A1
SERIAL NO

10866345

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Abstract

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Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SAES GETTERS S.P.A.MILAN139
SAES GETTES, S.P.A.2002 LAINATE (MILAN), IT1

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conte, Andrea Milan, IT 40 205
Moraja, Marco Milan, IT 12 52

Cited Art Landscape

Patent Info (Count) # Cites Year
 
MATERION CORPORATION (1)
6499354 Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices 52 1999
 
SAES GETTES, S.P.A. (1)
* 6620297 Porous getter devices with reduced particle loss and method for manufacturing same 6 2001
 
TEXAS INSTRUMENTS INCORPORATED (1)
5453659 Anode plate for flat panel display having integrated getter 58 1994
 
SAES GETTERS S.P.A. (8)
4312669 Non-evaporable ternary gettering alloy and method of use for the sorption of water, water vapor and other gases 98 1980
4996002 Tough and porus getters manufactured by means of hydrogen pulverization 11 1989
* 5908579 Process for producing high-porosity non-evaporable getter materials and materials thus obtained 7 1997
* 5879583 Process for producing high-porosity non-evaporable getter materials and materials thus obtained 4 1997
5961750 Nonevaporable getter alloys 40 1998
* 6589599 Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same 7 2000
* 6783696 Porous getter devices with reduced particle loss and method for manufacturing same 4 2003
* 7122100 Porous getter devices with reduced particle loss and method for manufacturing same 2 2004
 
Organisation Europeenne pour la Recherche Nucleaire (1)
6554970 Arrangement and method for improving vacuum in a very high vacuum system 5 1999
 
RAYTHEON COMPANY (1)
5701008 Integrated infrared microlens and gas molecule getter grating in a vacuum package 69 1996
 
MOTOROLA, INC. (1)
* 5688708 Method of making an ultra-high vacuum field emission display 37 1996
 
Composite Materials Technology, Inc. (1)
* 4925741 Getter wire 12 1989
 
EUROPEAN ORGANIZATION FOR NUCLEAR RESEARCH (1)
6468043 Pumping device by non-vaporisable getter and method for using this getter 5 1998
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
6110808 Hydrogen getter for integrated microelectronic assembly 15 1998
 
CANON KABUSHIKI KAISHA (1)
* 6559596 Getter, air tight chamber and image forming apparatus having getter, and manufacturing method of getter 19 2000
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SHOWA DENKO K.K. (2)
* 9129636 Method and apparatus for manufacturing magnetic recording medium 0 2008
* 2010/0227,050 METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM 0 2008
 
SAES GETTERS S.P.A. (4)
* 8986569 Flexible multi-layered getter 1 2006
* 2009/0215,610 Flexible multi-layered getter 9 2006
* 9278334 Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature 0 2012
* 2014/0255,715 NON-EVAPORABLE GETTER COMPOSITIONS WHICH CAN BE REACTIVATED AT LOW TEMPERATURE AFTER EXPOSURE TO REACTIVE GASES AT A HIGHER TEMPERATURE 0 2012
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (4)
* 8605445 Structure comprising a getter layer and an adjusting sublayer and fabrication process 1 2008
* 2010/0193,215 STRUCTURE COMPRISING A GETTER LAYER AND AN ADJUSTING SUBLAYER AND FABRICATION PROCESS 9 2008
8414963 Structure comprising a getter layer and an adjusting sublayer and fabrication process 3 2010
* 2010/0178,419 STRUCTURE COMPRISING A GETTER LAYER AND AN ADJUSTING SUBLAYER AND FABRICATION PROCESS 11 2010
 
CANON KABUSHIKI KAISHA (1)
* 2011/0234,091 NON-EVAPORABLE GETTER FOR FIELD-EMISSION DISPLAY 4 2011
 
KYOCERA MITA CORPORATION (1)
* 9756731 Package for housing electronic component and electronic device 0 2014
* Cited By Examiner

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