Biosensor, method of manufacturing sensing unit thereof, and measuring system
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United States of America Patent
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app pub date -
Jul 12, 2004
filing date -
Feb 20, 2001
priority date (Note) -
Abandoned
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Abstract
A biosensor, a method of fabricating the sensing unit for the biosensor, and a measuring system comprising the biosensor. The biosensor has an extended gate field effect transistor (EGFET) structure and comprises a metal oxide semiconductor field effect transistor (MOSFET) on a semiconductor substrate, a sensing unit comprising a substrate, a silicon dioxide layer on the substrate, a tin oxide layer on the silicon dioxide layer, and a urease layer immobilized on the tin oxide layer, and a conductive wire connecting the MOSFET and the sensing unit.
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