Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method
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United States of America Patent
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Dec 8, 2009
Grant Date -
Jan 13, 2005
app pub date -
Jun 16, 2004
filing date -
Jun 20, 2003
priority date (Note) -
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Abstract
Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal received by the light sensitive element.
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