Data collection and diagnostic system for a semiconductor fabrication facility
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United States of America Patent
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N/A
Issued Date -
Jan 13, 2005
app pub date -
Jul 10, 2003
filing date -
Jul 10, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a data collection and diagnostic system. The system, in one embodiment includes a data acquisition device that receives messages and alarm signals from each automation component controller. The system stores the messages and alarm signals received from each automation component controller and distributes the messages and alarm signals to a user--either locally or remotely. The system includes a configuration tool for selecting which messages and alarms signals are stored in a user accessible database. Multiple users may simultaneously access the information stored on the database or in real time over a network--either by a physical communication line or wirelessly.
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