Turbomolecular pump
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United States of America Patent
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-
Oct 9, 2007
Grant Date -
Jan 20, 2005
app pub date -
Jul 14, 2004
filing date -
Jul 15, 2003
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A turbomolecular pump includes a plurality of rotor and stator discs arranged alternatively one behind another and producing together a pumping effect, a plurality of spacer rings for retaining the stator discs at a distance from each other; and connection elements for fixedly connecting adjacent spacer rings with each other, so that the spacer rings together provide for securing and centering of the stator discs, taking over the function of a pump housing that is eliminated.
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Cited Art Landscape
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