Multi-layer electrode and method of forming the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7319270
APP PUB NO 20050023590A1
SERIAL NO

10929157

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Abstract

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An interconnect includes an opening formed in a dielectric layer. A conductive barrier is deposited in the opening, over which a first conductive layer is deposited. A conductive oxide is deposited over the first conductive layer, and a second conductive layer, formed from the same material as the first conductive layer, is deposited over the conductive liner.

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Patent Owner(s)

  • POLARIS INNOVATIONS LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lian, Jingyu Wallkill, NY 39 206
Lin, Chenting Poughkeepsie, NY 17 131
Nagel, Nicolas Yokohama, JP 55 563
Wise, Michael Lagrangeville, NY 35 1114

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