Spatial light modulator, lithographic apparatus and device manufacturing method
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United States of America Patent
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Dec 26, 2006
Grant Date -
Feb 3, 2005
app pub date -
Jun 25, 2004
filing date -
Jun 30, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A spatial light modulator used to pattern a radiation beam comprises an array of pixels disposed on a support. Each pixel has a light modulating element for modulating the radiation beam and a control circuit that positions the light modulating elements according to a desired pattern. The control circuit is disposed on the opposite side of the support than the light modulating elements. The control circuit comprises at least one of a digital to analog converter, an analog to digital converter, an optical fiber input, and a processor.
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