CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
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United States of America Patent
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Issued Date -
Feb 3, 2005
app pub date -
Jul 25, 2003
filing date -
Jul 25, 2003
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a composite material and the method of making same, which comprises a CVD diamond coating applied to a composite substrate of ceramic material and an unreacted carbide-forming material of various configurations and for a variety of applications. One example of the composite material is a composite of SiC and free silicon metal known as Reaction-Bonded Silicon Carbide. Several examples of applications of the invention include: 1) heads or disks for conditioning polishing pads, including pads used in Chemical-Mechanical-Planarization, 2) cutting and dressing tool inserts and tips, 3) heat spreaders for electronic devices, and 4) wear components including mechanical seals and pump seals.
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