US Patent Application No: 2005/0042,117
Number of patents in Portfolio can not be more than 2000
Optical interference display panel and manufacturing method thereof
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Feb 24, 2005
Publication date -
Mar 24, 2004
filing date -
10/807,128
serial no -
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Abstract
A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.
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First Claim
Related Publications
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
| Patent Owner | Address | Total Patents |
|---|---|---|
| QUALCOMM INCORPORATED | SAN DIEGO, CA | 7516 |
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| Lin, Wen-Jian | Hsinchu, TW | 52 | 3615 |
Patent Citation Ranking
Forward Cites
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 7,138,984 Directly laminated touch sensitive screen | 89 | 2001 | |
| 7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer | 20 | 2002 | |
| 7,297,471 Method for manufacturing an array of interferometric modulators | 17 | 2003 | |
| 7,198,973 Method for fabricating an interference display unit | 89 | 2003 | |
| 7,706,050 Integrated modulator illumination | 27 | 2004 | |
| 7,307,776 Optical interference display panel | 14 | 2004 | |
| 7,193,768 Interference display cell | 22 | 2004 | |
| 7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof | 25 | 2004 | |
| 7,476,327 Method of manufacture for microelectromechanical devices | 29 | 2004 | |
| 7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device | 45 | 2004 | |
| 7,855,824 Method and system for color optimization in a display | 15 | 2005 | |
| 7,893,919 Display region architectures | 2 | 2005 | |
| 7,813,026 System and method of reducing color shift in a display | 10 | 2005 | |
| 7,424,198 Method and device for packaging a substrate | 2 | 2005 | |
| 7,184,202 Method and system for packaging a MEMS device | 73 | 2005 | |
| 7,710,632 Display device having an array of spatial light modulators with integrated color filters | 22 | 2005 | |
| 7,626,751 Display device having an array of spatial light modulators with integrated color filters | 0 | 2005 | |
| 7,355,780 System and method of illuminating interferometric modulators using backlighting | 35 | 2005 | |
| 7,289,259 Conductive bus structure for interferometric modulator array | 55 | 2005 | |
| 7,460,246 Method and system for sensing light using interferometric elements | 8 | 2005 | |
| 7,359,066 Electro-optical measurement of hysteresis in interferometric modulators | 6 | 2005 | |
| 7,701,631 Device having patterned spacers for backplates and method of making the same | 2 | 2005 | |
| 7,928,928 Apparatus and method for reducing perceived color shift | 4 | 2005 | |
| 7,259,449 Method and system for sealing a substrate | 12 | 2005 | |
| 7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 3 | 2005 | |
| 7,668,415 Method and device for providing electronic circuitry on a backplate | 5 | 2005 | |
| 7,429,334 Methods of fabricating interferometric modulators by selectively removing a material | 12 | 2005 | |
| 7,420,728 Methods of fabricating interferometric modulators by selectively removing a material | 15 | 2005 | |
| 7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate | 7 | 2005 | |
| 7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion | 7 | 2005 | |
| 7,299,681 Method and system for detecting leak in electronic devices | 1 | 2005 | |
| 7,920,135 Method and system for driving a bi-stable display | 2 | 2005 | |
| 7,586,484 Controller and driver features for bi-stable display | 12 | 2005 | |
| 7,535,466 System with server based control of client device display features | 5 | 2005 | |
| 7,302,157 System and method for multi-level brightness in interferometric modulation | 37 | 2005 | |
| 7,289,256 Electrical characterization of interferometric modulators | 10 | 2005 | |
| 7,321,456 Method and device for corner interferometric modulation | 32 | 2005 | |
| 7,573,547 System and method for protecting micro-structure of display array using spacers in gap within display device | 6 | 2005 | |
| 7,372,613 Method and device for multistate interferometric light modulation | 63 | 2005 | |
| 8,362,987 Method and device for manipulating color in a display | 0 | 2005 | |
| 7,420,725 Device having a conductive light absorbing mask and method for fabricating same | 29 | 2005 | |
| 7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge | 3 | 2005 | |
| 7,719,500 Reflective display pixels arranged in non-rectangular arrays | 26 | 2005 | |
| 7,547,565 Method of manufacturing optical interference color display | 12 | 2005 | |
| 7,527,995 Method of making prestructure for MEMS systems | 20 | 2005 | |
| 7,446,926 System and method of providing a regenerating protective coating in a MEMS device | 19 | 2005 | |
| 7,808,703 System and method for implementation of interferometric modulator displays | 2 | 2005 | |
| 7,349,136 Method and device for a display having transparent components integrated therein | 7 | 2005 | |
| 8,008,736 Analog interferometric modulator device | 0 | 2005 | |
| 7,460,292 Interferometric modulator with internal polarization and drive method | 19 | 2005 | |
| 8,124,434 Method and system for packaging a display | 0 | 2005 | |
| 7,554,714 Device and method for manipulation of thermal response in a modulator | 18 | 2005 | |
| 7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator | 53 | 2005 | |
| 7,553,684 Method of fabricating interferometric devices using lift-off processing techniques | 6 | 2005 | |
| 7,417,783 Mirror and mirror layer for optical modulator and method | 7 | 2005 | |
| 7,373,026 MEMS device fabricated on a pre-patterned substrate | 12 | 2005 | |
| 7,343,080 System and method of testing humidity in a sealed MEMS device | 8 | 2005 | |
| 7,304,784 Reflective display device having viewable display on both sides | 33 | 2005 | |
| 7,161,730 System and method for providing thermal compensation for an interferometric modulator display | 78 | 2005 | |
| 7,567,373 System and method for micro-electromechanical operation of an interferometric modulator | 19 | 2005 | |
| 7,936,497 MEMS device having deformable membrane characterized by mechanical persistence | 0 | 2005 | |
| 7,463,421 Method and device for modulating light | 15 | 2005 | |
| 7,317,568 System and method of implementation of interferometric modulators for display mirrors | 1 | 2005 | |
| 7,492,502 Method of fabricating a free-standing microstructure | 11 | 2005 | |
| 7,417,735 Systems and methods for measuring color and contrast in specular reflective devices | 23 | 2005 | |
| 7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 14 | 2005 | |
| 7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator | 10 | 2005 | |
| 7,911,428 Method and device for manipulating color in a display | 14 | 2005 | |
| 7,807,488 Display element having filter material diffused in a substrate of the display element | 17 | 2005 | |
| 7,728,800 Method and device for manipulating color in a display | 0 | 2005 | |
| 7,564,612 Photonic MEMS and structures | 53 | 2005 | |
| 7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator | 144 | 2005 | |
| 7,369,294 Ornamental display device | 38 | 2005 | |
| 7,684,104 MEMS using filler material and method | 7 | 2005 | |
| 7,898,521 Device and method for wavelength filtering | 17 | 2005 | |
| 7,782,293 Device and method for wavelength filtering | 0 | 2005 | |
| 7,653,371 Selectable capacitance circuit | 10 | 2005 | |
| 7,415,186 Methods for visually inspecting interferometric modulators for defects | 3 | 2005 | |
| 7,453,579 Measurement of the dynamic characteristics of interferometric modulators | 10 | 2005 | |
| 7,236,284 Photonic MEMS and structures | 82 | 2005 | |
| 7,630,114 Diffusion barrier layer for MEMS devices | 1 | 2005 | |
| 7,618,831 Method of monitoring the manufacture of interferometric modulators | 0 | 2005 | |
| 7,403,323 Process control monitors for interferometric modulators | 1 | 2005 | |
| 7,369,252 Process control monitors for interferometric modulators | 0 | 2005 | |
| 7,259,865 Process control monitors for interferometric modulators | 20 | 2005 | |
| 7,561,334 Method and apparatus for reducing back-glass deflection in an interferometric modulator display device | 1 | 2005 | |
| 7,795,061 Method of creating MEMS device cavities by a non-etching process | 1 | 2005 | |
| 7,916,980 Interconnect structure for MEMS device | 0 | 2006 | |
| 7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 4 | 2006 | |
| 7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof | 2 | 2006 | |
| 7,547,568 Electrical conditioning of MEMS device and insulating layer thereof | 6 | 2006 | |
| 7,550,810 MEMS device having a layer movable at asymmetric rates | 19 | 2006 | |
| 7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers | 40 | 2006 | |
| 7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices | 11 | 2006 | |
| 7,532,377 Movable micro-electromechanical device | 28 | 2006 | |
| 7,643,203 Interferometric optical display system with broadband characteristics | 17 | 2006 | |
| 7,903,047 Mode indicator for interferometric modulator displays | 2 | 2006 | |
| 7,711,239 Microelectromechanical device and method utilizing nanoparticles | 0 | 2006 | |
| 7,623,287 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,527,996 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,417,784 Microelectromechanical device and method utilizing a porous surface | 42 | 2006 | |
| 8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display | 1 | 2006 | |
| 7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display | 0 | 2006 | |
| 7,706,044 Optical interference display cell and method of making the same | 8 | 2006 | |
| 7,880,954 Integrated modulator illumination | 14 | 2006 | |
| 7,369,292 Electrode and interconnect materials for MEMS devices | 13 | 2006 | |
| 7,349,139 System and method of illuminating interferometric modulators using backlighting | 15 | 2006 | |
| 7,372,619 Display device having a movable structure for modulating light and method thereof | 74 | 2006 | |
| 7,649,671 Analog interferometric modulator device with electrostatic actuation and release | 7 | 2006 | |
| 7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports | 3 | 2006 | |
| 7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts | 60 | 2006 | |
| 7,636,151 System and method for providing residual stress test structures | 0 | 2006 | |
| 7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures | 4 | 2006 | |
| 7,835,061 Support structures for free-standing electromechanical devices | 4 | 2006 | |
| 7,385,744 Support structure for free-standing MEMS device and methods for forming the same | 42 | 2006 | |
| 7,527,998 Method of manufacturing MEMS devices providing air gap control | 10 | 2006 | |
| 7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs | 3 | 2006 | |
| 7,566,940 Electromechanical devices having overlying support structures | 7 | 2006 | |
| 7,534,640 Support structure for MEMS device and methods therefor | 13 | 2006 | |
| 7,830,586 Transparent thin films | 10 | 2006 | |
| 7,554,711 MEMS devices with stiction bumps | 30 | 2006 | |
| 7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices | 3 | 2006 | |
| 7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants | 24 | 2006 | |
| 7,580,172 MEMS device and interconnects for same | 4 | 2006 | |
| 7,706,042 MEMS device and interconnects for same | 2 | 2006 | |
| 7,652,814 MEMS device with integrated optical element | 3 | 2007 | |
| 7,518,775 Method and system for packaging a MEMS device | 6 | 2007 | |
| 7,746,537 MEMS devices and processes for packaging such devices | 9 | 2007 | |
| 7,715,080 Packaging a MEMS device using a frame | 1 | 2007 | |
| 8,059,326 Display devices comprising of interferometric modulator and sensor | 1 | 2007 | |
| 7,738,156 Display devices comprising of interferometric modulator and sensor | 0 | 2007 | |
| 7,826,127 MEMS device having a recessed cavity and methods therefor | 0 | 2007 | |
| 7,642,127 Method and system for sealing a substrate | 2 | 2007 | |
| 7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device | 14 | 2007 | |
| 7,570,415 MEMS device and interconnects for same | 1 | 2007 | |
| 7,629,678 Method and system for sealing a substrate | 1 | 2007 | |
| 7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same | 2 | 2007 | |
| 7,564,613 Microelectromechanical device and method utilizing a porous surface | 2 | 2007 | |
| 8,111,445 Spatial light modulator with integrated optical compensation structure | 1 | 2008 | |
| 7,623,752 System and method of testing humidity in a sealed MEMS device | 4 | 2008 | |
| 7,570,865 System and method of testing humidity in a sealed MEMS device | 1 | 2008 | |
| 8,045,252 Spatial light modulator with integrated optical compensation structure | 1 | 2008 | |
| 8,040,588 System and method of illuminating interferometric modulators using backlighting | 0 | 2008 | |
| 8,222,066 Eliminate release etch attack by interface modification in sacrificial layers | 0 | 2008 | |
| 7,664,345 MEMS device fabricated on a pre-patterned substrate | 2 | 2008 | |
| 7,587,104 MEMS device fabricated on a pre-patterned substrate | 1 | 2008 | |
| 7,951,634 Method and device for protecting interferometric modulators from electrostatic discharge | 0 | 2008 | |
| 8,045,835 Method and device for packaging a substrate | 1 | 2008 | |
| 7,864,403 Post-release adjustment of interferometric modulator reflectivity | 0 | 2009 | |
| 8,394,656 Method of creating MEMS device cavities by a non-etching process | 0 | 2010 | |
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| 7,532,385 Optical interference display panel and manufacturing method thereof | 10 | 2004 | |
| 7,470,373 Optical interference display panel | 7 | 2006 | |
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| 7,256,922 Interferometric modulators with thin film transistors | 27 | 2004 | |
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| 7,172,915 Optical-interference type display panel and method for making the same | 69 | 2004 | |
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 24, 2016 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |