Interferometric modulation pixels and manufacturing method thereof
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United States of America Patent
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Issued Date -
Mar 3, 2005
app pub date -
Mar 31, 2004
filing date -
Sep 3, 2003
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Abstract
A hydrophobic layer covers the cavity-side surface of the bottom electrode of the interferometric modulation pixel. Consequently, the hydrophobic layer prohibits the hydrophilic surface of the bottom electrode from the adsorption of water molecules, thereby preventing the top electrode from being pulled toward the bottom electrode when the interferometric modulation pixel is active.
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