Method for interaction with status and control apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Mar 3, 2005
app pub date -
Sep 28, 2004
filing date -
Mar 29, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A GUI is presented for managing a semiconductor processing system that is comprehensible and standardized in format. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired data collection, monitoring, modeling, and troubleshooting tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser. The GUI allows a user to display real-time tool and process module statuses based upon process module events and alarm messages, historical data numerically and/or graphically, SPC charts, APC system logs, and Alarm logs. In addition, the GUI allows a user to print graphs and reports, to save data to files, to export data, to import data, and set up or modify the system.
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Family
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Cited Art Landscape
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