Cylindrical magnetron with self cleaning target
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United States of America Patent
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app pub date -
Aug 12, 2004
filing date -
Feb 21, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A cylindrical magnetron capable of running at high current and voltage levels with a target tube that is self cleaning not only in the center portion, but also at the ends. Sputtering the ends of the target tube virtually eliminates accumulation of condensate at the ends and any resultant arcing, resulting in a more reliable magnetron requiring less service and a magnetron that produces more consistent coatings. A low sputtering-rate collar is affixed to the target tube in the turnaround area.
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