Tapered multi-layer thermal actuator and method of operating same
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United States of America Patent
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Apr 18, 2006
Issued Date -
N/A
app pub date -
Sep 29, 2004
filing date -
Nov 13, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter for use in an ink jet printhead, is disclosed. The disclosed thermal actuator includes a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the baffler layer is bonded between the first and second deflector layers.
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