System and apparatus for sensing pressure in living organisms and inanimate objects
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United States of America Patent
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Aug 7, 2007
Grant Date -
Mar 24, 2005
app pub date -
Aug 18, 2004
filing date -
Aug 22, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
System and apparatus for measuring pressure including a microelectronic device, an interface member attached to the microelectronic device, a pressure sensor having a diaphragm responsive to external pressure exerted upon the diaphragm, wherein the interface member is positioned between the microelectronic device and the pressure sensor and is attached to the pressure sensor providing a first cavity between the pressure sensor diaphragm and the interface member and wherein the pressure in the first cavity is set at an initial predetermined pressure.
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