Apparatus for fabricating coating and method of fabricating the coating
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United States of America Patent
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Apr 20, 2010
Grant Date -
Apr 28, 2005
app pub date -
Nov 2, 2004
filing date -
Jul 20, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.
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