Flat panel display manufacturing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
May 5, 2005
app pub date -
Nov 1, 2004
filing date -
Nov 4, 2003
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Disclosed herein is a flat panel display manufacturing apparatus that is capable of performing a predetermined process, such as deposition or etching on a substrate under vacuum. The flat panel display manufacturing apparatus comprises a pin supporting member disposed at the outside of the flat panel display manufacturing apparatus. The pin supporting member is connected to a plurality of lift pins, which lift a substrate from a lower substrate or put the substrate on the lower substrate, for driving the lift pins upward or downward at the same time. Consequently, the inside volume of the flat panel display manufacturing apparatus is decreased as compared to the conventional flat panel display manufacturing apparatus, and thus time for carrying out a pumping operation to apply high-vacuum to the inside of the flat panel display manufacturing apparatus is considerably reduced.
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