Transfer chamber for flat display device manufacturing apparatus
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United States of America Patent
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-
Feb 23, 2010
Grant Date -
May 5, 2005
app pub date -
Nov 1, 2004
filing date -
Nov 4, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.
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