Gas sensor device
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United States of America Patent
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May 30, 2006
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N/A
app pub date -
Nov 12, 2003
filing date -
Nov 12, 2003
priority date (Note) -
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Abstract
A gas sensor device including a semiconductor substrate; one or more catalytic gate-electrodes deposited on a surface of the semiconductor substrate; one or more ohmic contacts deposited on the surface of the semiconductor substrate and a passivation layer deposited on at least a portion of the surface; wherein the semiconductor substrate includes a material selected from the group consisting of silicon carbide, diamond, Group III nitrides, alloys of Group III nitrides, zinc oxide, and any combinations thereof.
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